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點膠檢測設備
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流體控制器、閥體
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Specifications |
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1. EFEM Unit |
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Dimensions(1 load port) |
W670 X L1780 X H2076 |
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Weight |
480kg ~520 kg |
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Wafer transfer Size |
300mm x 300 mm |
|
Foup Loader |
1 pcs |
|
SECS/GEM |
GEM 300 |
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2.Power |
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電力系統負載 |
3P,220 VAC ;60HZ ;25A |
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3.Alignment ability |
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Product Size |
300mm x 300mm |
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Product Type |
Silicon / Glass |
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Detection function |
非接觸式紅外線檢測, Notch 檢測 |
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4.Transfer |
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Product Type |
Silicon only |
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Catch function |
Fork for Vacuum |
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Robot |
Clean Robot:單ARM R axis Stroke =650mm、Z axis Stroke =300mm |
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5.Quality |
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ESD |
< 25V |
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FFU |
AC 1Φ 200/220V±%10, Class 10~100 (HEPA風扇失效需立即停機報警)。 |
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E84 Sensor |
For OHT |
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Ionizer |
For Transfer window; 1pcs |
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無塵等級 |
FS209 Class 10~100 |
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6.Safety |
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Area Sensor |
For Loadport safety door.; EMO:3pcs |
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SEMI認證 |
符合E1.9、E15.1、E47.1、E57、E62、E63、E64。 |
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Loadport |
SEMI規格300mmFOUP/ Auto Door FOSB |
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