General

Aluminum alloy die casting(Anodizing)

W570 x L500 x H1380

Transport speed

180~1800mm/min

Transport weight

380mm

vacuum plant

operation function: 3 times action

Plant limit for (ABCD) face

plant positioning accuracy ±0.5mm

Power

AC 1 Φ 200/220V% ±10

Material Handling

Material

Glass, Si, MC wafer, Glass+MC wafer, Si+MC wafer，Glass+Si

Equipment Performance

Uptime

>95%

Wafer transfer failure rate

<10 PPM

Unscheduled downtime

<3% (By month)

Scheduled downtime

<2% (By month)

MTBF

> 500 hrs

MTBA

> 200hrs

MTBR

<3hrs

Critical parts coverage

100% local stock

WPH

30

Equipment Requirement

Conveyor width

Conveyor width adjustment (290 ~ 360mm)

Aligner

303mm±0.5mm

SUS Chamber encapsulated System

Fully SUS Chamber encapsulated System with low Nitrogen Atmosphere

Transport hight

920mm+/-20mm

Speed regulation and control per circuit

YES

Flatscreen monitor and signal tower

Three color

Color

White Paint

CE package including components - safety

YES

Temperature limit

<70 ℃

SMEMA

Interface for handling systems, SMEMA

Fixture frame

square

340 X 380  mm

vacuum diamet

Φ303mm

vacuum holdder high

2mm

each pins distance

>115mm , <150mm